The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Apr. 28, 2021
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Kazutoshi Nagata, Annaka, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
Provided is a method of manufacturing a composite substrate equipped with a piezoelectric single-crystal film having good film-thickness uniformity and not causing deterioration in properties even if ion implantation is performed. The method of manufacturing a composite substrateequipped with a piezoelectric single-crystal filmaccording to the present invention includes the steps of: (a) subjecting a piezoelectric single-crystal substratemade of lithium tantalate or lithium niobate to ion implantation treatment to form an ion implantation layer, (c) bonding the surface of the piezoelectric single-crystal substratehaving the ion implantation layerthereon to a temporary bonding substrate, (d) separating the piezoelectric single-crystal substrateinto the ion implantation layerand the remaining portion of the substrate to form a piezoelectric single-crystal filmon the temporary bonding substrate, (f) bonding a supporting substrateto the surface of the piezoelectric single-crystal filmopposite to a bonded surface of the temporary bonding substrate, and (g) separating the temporary bonding substrate from the piezoelectric single-crystal film