The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Dec. 05, 2023
Etel S.a., Môtiers, CH;
Basile Renaud Graf, Neuchâtel, CH;
ETEL S.A., Môtiers, CH;
Abstract
A motion system includes a motion hardware system and a motion control system configured to control the movement of the motion hardware system. The hardware system includes a motion stage, a platform supporting the motion stage, and a machine frame resting on a ground surface. The platform includes a base and an active vibration isolation system arranged between the base and the machine frame. The active vibration isolation system includes actuators to provide together at least three degrees-of-freedom actuation of the base. The motion control system includes a feedforward control having a vibration isolation system controller for controlling the at least three DOF actuation of the active vibration isolation system to compensate, by exerting a counteracting force on the base, for expected reactions forces exerted by the motion stage on the base when operating. The feedforward control includes a memory for storing a string of characters defining the motion equations based on the topology of the motion stage, and a processing unit for processing the string of characters to compute the counteracting force.