The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Apr. 10, 2023
Applicant:
Veeco Instruments Inc., Plainview, NY (US);
Inventors:
Matthew Earl Wallace Reed, San Jose, CA (US);
Xiaohua Shen, Fremont, CA (US);
Assignee:
Veeco Instruments Inc., Plainview, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/354 (2014.01); G02B 21/00 (2006.01); G06T 7/00 (2017.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); B23K 26/354 (2015.10); G02B 21/0028 (2013.01); G02B 21/0052 (2013.01); G02B 21/008 (2013.01); G06T 7/001 (2013.01); H01L 21/268 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/30148 (2013.01);
Abstract
High bandwidth time-and-space resolved scatter phase transition microscopy systems configured to detect melt onset in a wafer being processed by laser annealing systems with ultra-short dwell times and spot size.
Reed, Matthew Earl Wallace. (2025). Scatter melt detection to determine phase transition of semiconductor during laser annealing (U.S. Patent No. 12512346). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12512346
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile