The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Aug. 11, 2023
Applicant:
Trumpf Huettinger Gmbh + Co. KG, Freiburg, DE;
Inventors:
Florian Maier, Pfaffenweiler, DE;
Thomas Sprenger-Lorenz, Freiburg, DE;
Assignee:
TRUMPF HUETTINGER GMBH + CO. KG, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01);
Abstract
A power supply device for generating an electrical high frequency (HF) power signal for a plasma includes a power generator and an impedance matching arrangement connected to the power generator. The power supply device is configured to determine an impedance variable at an input of the impedance matching arrangement or at an output of the power generator, determine an impedance-based quality index in a predefined time period, and output the impedance-based quality index.