The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2025

Filed:

Jul. 26, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Hee-Jun Lee, Seoul, KR;

Sang Wook Kim, Yongin-si, KR;

Heung Suk Oh, Bucheon-si, KR;

Jee Eun Jung, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/392 (2020.01); G03F 1/36 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G06F 30/392 (2020.01);
Abstract

An optical proximity correction system and an operating method are provided. Provided is an optical proximity correction system comprising, a plurality of patch blocks which include a plurality of patches including a segment information table, a plurality of slave devices which receive the segment information table from the plurality of patch blocks to generate a minimum patch table, and a master device which receives the minimum patch table from the plurality of slave devices, generates a segment average calculation table, and performs an optical proximity correction on the patches recorded in the segment average calculation table.


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