The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Sep. 06, 2023
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Tomohiro Sugimoto, Saitama, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02015 (2022.01); G01B 9/0209 (2022.01); G01B 11/14 (2006.01); G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/0203 (2013.01); G01B 9/0209 (2013.01); G01B 11/14 (2013.01); G01M 11/0207 (2013.01); G01M 11/0221 (2013.01); G01M 11/0271 (2013.01);
Abstract
An acquiring apparatus includes a first light source, a measurement optical system, an image sensor, an adjusting unit, an interferometer, and a calculating unit configured to calculate a distance between adjacent target surfaces among the plurality of target surfaces based on an interference signal. The index surface, a surface containing the first point, a surface containing the second point, and the light receiving surface have a conjugate relationship with each other with respect to the measurement optical system.