The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Mar. 11, 2022
Edwards Japan Limited, Yachiyo, JP;
Masayuki Hashimoto, Yachiyo, JP;
Yoshinobu Ohtachi, Yachiyo, JP;
Yasushi Maejima, Yachiyo, JP;
Tsutomu Takaada, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pumpincludes a turbomolecular pumpthat exhausts gas inside a semiconductor manufacturing apparatus X, and a controllerthat performs control on the turbomolecular pump. The controllerincludes a remote signal receiving means that receives a command signal from a remote controller, which remotely controls the turbomolecular pump, and changes a setting relating to an operating specification of the turbomolecular pumpon the basis of the command signal received by the remote signal receiving means.