The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2025

Filed:

Jan. 04, 2024
Applicants:

Innolux Corporation, Miao-Li County, TW;

Carux Technology Pte. Ltd., Singapore, SG;

Inventors:

Cheng-Wei Liu, New District, TW;

Liang-Cheng Ma, Miao-Li County, TW;

Assignees:

Innolux Corporation, Miaoli County, TW;

CARUX TECHNOLOGY PTE. LTD., Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3464 (2013.01); C23C 14/505 (2013.01); H01J 37/32403 (2013.01); H01J 37/32733 (2013.01); H01J 37/3447 (2013.01);
Abstract

A deposition apparatus is provided, including a deposition chamber, at least one target, at least one substrate holder, and at least one adjustment plate. The at least one target, the at least one substrate holder, and the at least one adjustment plate are disposed in the deposition chamber, and the at least one adjustment plate is disposed between the at least one target and the at least one substrate holder. The at least one substrate holder includes a base portion, a first supporting portion, and a second supporting portion. The base portion has a flat surface. The first supporting portion is disposed on the flat surface and includes a curved surface. The second supporting portion is disposed on the flat surface and protrudes from it.


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