The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2025

Filed:

Aug. 19, 2022
Applicant:

University of Science and Technology Beijing, Beijing, CN;

Inventors:

Xiaolu Pang, Beijing, CN;

Tao Guo, Beijing, CN;

Kewei Gao, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C01B 21/06 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C30B 25/06 (2006.01); C30B 25/18 (2006.01); C30B 29/38 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3464 (2013.01); C01B 21/0602 (2013.01); C23C 14/0036 (2013.01); C23C 14/0647 (2013.01); C23C 14/345 (2013.01); C30B 25/06 (2013.01); C30B 25/18 (2013.01); C30B 29/38 (2013.01);
Abstract

In a general aspect, a ceramic thin film with nanotwinned regions at a tunable volume fraction is manufactured. In some aspects, a method for manufacturing a ceramic thin film on a surface of a substrate in an evacuated chamber is disclosed. The ceramic thin film includes crystalline grains; and each of the crystalline grains includes one or more nanotwinned regions. The one or more nanotwinned regions have a volume fraction in a range of 30-80% of the ceramic thin film. The ceramic thin film comprises titanium, nitrogen, and boron. A plurality of targets including a plurality of sputtering materials is prepared. A gas atmosphere in the evacuated chamber is formed. Electric power is supplied to the plurality of targets to cause co-sputtering of the plurality of sputtering materials to form the ceramic thin film with the one or more nanotwinned regions.


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Pang, Xiaolu. (2025). Forming nanotwinned regions in a ceramic coating at a tunable volume fraction (U.S. Patent No. 12509760). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12509760

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