The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
May. 15, 2023
Applicant:
Niterra Co., Ltd., Nagoya, JP;
Inventor:
Atsushi Tsuchida, Nagoya, JP;
Assignee:
NITERRA CO., LTD., Nagoya, JP;
Primary Examiner:
Int. Cl.
CPC ...
C01F 17/34 (2020.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C01F 17/34 (2020.01); H01L 21/67017 (2013.01); C01P 2004/03 (2013.01); C01P 2006/90 (2013.01);
Abstract
A YAG sintered body has a predetermined surface where intragranular pores are exposed. On the predetermined surface, arithmetic average roughness Ra satisfies Ra≤0.5 μm, and a ratio between maximum height Rz and maximum valley depth Rv satisfies Rv/Rz≤0.7. With this configuration, the predetermined surface of a processed surface is smoothed to have improved plasma resistance and exhibit a particle-suppressing effect.