The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Aug. 27, 2020
Applicant:
Hamamatsu Photonics K.k., Hamamatsu, JP;
Inventors:
Assignee:
HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B08B 1/16 (2024.01); B08B 6/00 (2006.01); B08B 7/00 (2006.01); B08B 11/00 (2006.01); B81B 3/00 (2006.01); B81C 3/00 (2006.01); G02B 26/08 (2006.01); G02B 27/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00857 (2013.01); B08B 6/00 (2013.01); B08B 7/0028 (2013.01); B08B 11/00 (2013.01); B81B 3/0062 (2013.01); B81C 1/00174 (2013.01); B81C 1/00198 (2013.01); B81C 1/00849 (2013.01); G02B 26/0833 (2013.01); G02B 27/0006 (2013.01); H01L 21/02057 (2013.01); H01L 21/02096 (2013.01); B08B 1/165 (2024.01); B81C 3/00 (2013.01);
Abstract
A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion; and a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step. A mirror unit manufacturing method includes a sealing step of sealing the mirror device after the collecting step.