The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Oct. 25, 2022
Robert Bosch Gmbh, Stuttgart, DE;
Bo Cheng, Malden, MA (US);
Holger Rumpf, Reutlingen, DE;
Jens Frey, Filderstadt, DE;
Charles Tuffile, Swansea, MA (US);
Stephanie Karg, Stuttgart, DE;
Tobias Joachim Menold, Weil der Stadt, DE;
Robert Bosch GmbH, , DE;
Abstract
A venthole of a micromechanical device is sealed with laser irradiation. A micromechanical device has a substrate, such as silicon. The substrate has an upper surface, and defines a venthole leading to a chamber that contains a device, and a trench extending downward from the upper surface and located offset from the venthole. A laser pulse is applied to the substrate at or within the trench. This causes a portion of the substrate located below the upper surface to melt and travel laterally to close off and seal the venthole laterally from beneath the upper surface.