The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2025

Filed:

Dec. 02, 2022
Applicant:

Celloptic, Inc., Rockville, MD (US);

Inventors:

Gary Brooker, Rockville, MD (US);

Nisan Siegel, Silver Spring, MD (US);

Assignee:

CELLOPTIC, INC., Rockville, MD (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H 1/00 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G03H 1/04 (2006.01); G03H 1/08 (2006.01);
U.S. Cl.
CPC ...
G03H 1/0005 (2013.01); G01N 21/9505 (2013.01); G01N 21/95684 (2013.01); G03H 1/0443 (2013.01); G03H 1/0866 (2013.01); G03H 2001/0044 (2013.01);
Abstract

An advance in high-resolution optical metrology has been achieved by the introduction of incoherent holographic imaging. FINCH, an example of incoherent holography, is shown to simplify the process, eliminating many steps in metrology and at the same time increasing throughput, resolution and accuracy of the method. A proposed technique requires only a single image capture with a non-moving camera rather than the capture of multiple stacks of images requiring many camera exposures and movement of the camera or sample in the conventional techniques.


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