The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Dec. 03, 2021
Screen Holdings Co., Ltd., Kyoto, JP;
Shota Majima, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
Provided is a drawing apparatus capable of drawing with high accuracy on a surface having a shape whose height exceeds a focal depth without complicatedly adjusting focus of an optical system. A substrate can be placed on a stage. A drawing head includes a spatial light modulator that generates modulated light, and a projection optical system that focuses the modulated light on a focus position in a height direction over the stage. A mover relatively moves the stage and the drawing head in the horizontal direction. A controller controls the mover and the drawing head. The controller controls the spatial light modulator based on correction pattern data representing a correction pattern, and the correction pattern data is generated by correcting design pattern data representing a design pattern based on surface profile data representing a surface profile of the substrate.