The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Mar. 02, 2023
Canon Kabushiki Kaisha, Tokyo, JP;
Kenichi Kobayashi, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus comprising a plurality of gas supply units configured to supply a gas to a space between a mold and a substrate; and a control unit configured to control the gas supply units and an imprint operation to sequentially imprint on a plurality of imprint regions of the substrate; wherein the control unit acquires position information of the imprint regions on the substrate, imprint order information, and predetermined gas supply amount information for each of the imprint regions, and wherein, at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is to be changed from a first direction to a second direction, the control unit controls both of a first direction side and a second direction side of the plurality of gas supply units to supply a predetermined amount of the gas based on the gas supply amount information.