The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Jul. 28, 2022
Spea S.p.a., Volpiano, IT;
Luciano Bonaria, Volpiano, IT;
SPEA S.P.A., Volpiano, IT;
Abstract
A wafer prober includes a support structure defining a first upper guide and a first lower guide parallel to a first horizontal axis and vertically overlapping with each other, measuring units that each include a first carriage sliding along a first guide, a second guide carried by the first carriage and parallel to a second horizontal axis orthogonal to the first axis, a second carriage sliding along the second guide, and a movable terminal assembly carried by the second carriage, and a measuring head carried by the movable terminal assembly and provided with needle contacts that interact with points of the wafer. The movable terminal assembly is configured to move the measuring head according to a linear degree of freedom along a vertical axis and at least one rotational degree of freedom about the vertical axis. The wafer prober includes a control unit that controls the measuring units independently.