The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Aug. 04, 2021
Applicant:
Msg Lithoglas Gmbh, Dresden, DE;
Inventors:
Assignees:
MSG Lithoglas GmbH, Dresden, DE;
LYNRED, Palaiseau, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01J 5/08 (2022.01); G01J 5/0875 (2022.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); B81B 7/0067 (2013.01); B81C 1/00317 (2013.01); G01J 5/0875 (2013.01); G01J 5/0879 (2022.01); B81B 2201/0207 (2013.01); B81C 2203/0109 (2013.01); B81C 2203/031 (2013.01);
Abstract
A method of forming an infrared detector includes defining an optical window in a cover substrate. Defining the optical window includes forming a multilayer interference filter or a periodic diffraction grating on an upper surface of the optical window and a periodic diffraction grating on the lower surface of the optical window. The method also includes performing anodic bonding of a spacer onto the cover substrate, transferring the cover substrate provided onto a base substrate, and hermetically bonding the spacer onto the base substrate.