The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2025

Filed:

Mar. 17, 2023
Applicant:

The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);

Inventors:

Behrad Habib Afshar, Stanford, CA (US);

Michel J.F. Digonnet, Palo Alto, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01H 9/00 (2006.01); G02B 6/42 (2006.01);
U.S. Cl.
CPC ...
G01H 9/004 (2013.01); G02B 6/4214 (2013.01); G02B 6/423 (2013.01); G02B 6/424 (2013.01); G02B 6/4245 (2013.01);
Abstract

An acoustic sensor includes at least one optical waveguide configured to emit an optical beam, a substantially planar first substrate optically coupled to the at least one optical waveguide, and a substantially planar second substrate substantially parallel to the first substrate, affixed to the first substrate, and affixed to the at least one optical waveguide. The first substrate is configured to be illuminated by the optical beam and to reflect at least a portion of the optical beam to the at least one optical waveguide. The first substrate includes a first substrate portion configured to reflect a first portion of the optical beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the optical beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The optical beam is centered on a region between the first substrate portion and the diaphragm.


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