The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Mar. 01, 2022
Applicant:

Tdk Corporation, Tokyo, JP;

Inventor:

Junpei Morishita, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/00 (2023.01); H10N 30/50 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H10N 30/708 (2024.05); H10N 30/50 (2023.02); H10N 30/8536 (2023.02);
Abstract

A piezoelectric thin film includes a first piezoelectric layer and a second piezoelectric layer directly stacked on the first piezoelectric layer. The first piezoelectric layer contains a tetragonal crystalof a perovskite-type oxide. The second piezoelectric layer contains a tetragonal crystalof a perovskite-type oxide. A (001) plane of the tetragonal crystalis oriented in a normal direction do of a surface of the piezoelectric thin film. A (001) plane of the tetragonal crystalis oriented in the normal direction dn of the surface of the piezoelectric thin film. An interval of the (001) plane of the tetragonal crystalis c, an interval of a (100) plane of the tetragonal crystalis a, an interval of the (001) plane of the tetragonal crystalis c, an interval of a (100) plane of the tetragonal crystalis a, c/ais more than c/aand c/ais from 1.015 to 1.050.


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