The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Sep. 01, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Ricardo Martinez, Manteca, CA (US);

Jagan Rangarajan, San Jose, CA (US);

Sami Mustafa, Santa Clara, CA (US);

Tarun Kumar Abichandani, Sunnyvale, CA (US);

Lukas Sykora, Tigard, OR (US);

Shih-Yu Liu, Santa Clara, CA (US);

Hung X. Hoang, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F16K 27/00 (2006.01); F16K 27/02 (2006.01); F16L 9/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); F16K 27/00 (2013.01); F16K 27/003 (2013.01); F16K 27/0236 (2013.01); F16L 9/125 (2013.01);
Abstract

A fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path segment formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path segment formed within the single-piece body that extends from first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.


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