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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12500071 B1

PDFFull Text
Date of Patent:
Dec. 16, 2025

Filed:

Sep. 07, 2022

Wafer placement table

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Tatsuya Kuno, Nagoya, JP;

Seiya Inoue, Handa, JP;

Hiroshi Takebayashi, Handa, JP;

Masaki Ishikawa, Handa, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:

BURR PATENT LAW, PLLC

Primary Examiner:

Devon Lane

Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); H01L 21/68785 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2005 (2013.01); H01J 2237/2007 (2013.01);
Abstract

A wafer placement table is a wafer placement table that includes a refrigerant flow channel through which refrigerant is flowed and includes a top base including a ceramic base incorporating an electrode and having a wafer placement surface on a top surface of the ceramic base, a bottom base on a top surface of which a flow channel groove defining a side wall and a bottom of the refrigerant flow channel is provided, and a seal member disposed between the top base and the bottom base so as to seal the refrigerant flow channel from an outside.

Find Patent Forward Citations

Kuno, Tatsuya. (2025). Wafer placement table (U.S. Patent No. 12500071). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12500071

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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