The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Mar. 16, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Prerna Goradia, Mumbai, IN;
Jennifer Y. Sun, Santa Clara, CA (US);
Xiaowei Wu, Santa Clara, CA (US);
Geetika Bajaj, Mumbai, IN;
Atul Chaudhari, Mumbai, IN;
Ankur Kadam, Mumbai, IN;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/18 (2006.01); C23C 16/27 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4404 (2013.01); C23C 16/18 (2013.01); C23C 16/277 (2013.01); C23C 16/405 (2013.01); C23C 16/45529 (2013.01); C23C 16/45544 (2013.01); H01J 37/32477 (2013.01);
Abstract
Described herein are articles, systems and methods where a halogen resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The halogen resistant coating has an optional amorphous seed layer and a transition metal-containing layer. The halogen resistant coating uniformly covers features of the chamber component, such as those having an aspect ratio of about 3:1 to about 300:1.