The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2025

Filed:

Mar. 31, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Su Jin Jung, Hwaseong-si, KR;

Jin Bum Kim, Seoul, KR;

Da Hye Kim, Seoul, KR;

In Gyu Jang, Seoul, KR;

Dong Suk Shin, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 62/10 (2025.01); H10D 30/67 (2025.01); H10D 64/01 (2025.01);
U.S. Cl.
CPC ...
H10D 62/118 (2025.01); H10D 30/6713 (2025.01); H10D 30/6757 (2025.01); H10D 64/018 (2025.01);
Abstract

A semiconductor device is provided. A semiconductor device comprising a first active pattern including a first lower pattern and a plurality of first sheet patterns spaced apart from the first lower pattern in a first direction and having a first source/drain recess formed therein, a first source/drain pattern filling the first source/drain recess and in contact with the first sheet patterns on the first lower pattern, and first gate structures disposed on both sides of the first source/drain pattern in a second direction different from the first direction and each including first gate electrodes each surrounding the plurality of first sheet patterns, wherein the first source/drain pattern includes a first region on the first lower pattern, second regions including impurities of a conductivity type different from that of the first region and in contact with the first region and side surfaces of the first sheet patterns, and a third region between the second regions, and a thickness of the first region in the first direction is greater than a thickness of the second region.


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