The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Jun. 01, 2020
Agency for Science, Technology and Research, Singapore, SG;
Lennon Yao Ting Lee, Singapore, SG;
Agency for Science, Technology and Research, Singapore, SG;
Abstract
A chemical sensor that includes a first semiconductor substrate. The chemical sensor may also include a second semiconductor substrate. The chemical sensor may further include one or more metal layers between the first semiconductor substrate and the second semiconductor substrate such that the first and second semiconductor substrates and the one or more metal layers form a cell including a cavity, the cavity having a depth of any value equal to or less than 100 μm. The chemical sensor may also include an optical source. The chemical sensor may additionally include an optical detector such that light emitted by the optical source passes through the cell to the optical detector. The first and second semiconductor substrates and the one or more metal layers may also define at least one inlet for fluid to flow into the cavity and at least one outlet for fluid to flow out of the cavity.