The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Mar. 26, 2021
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Junhyeuk Ko, Yongin-si, KR;
Euigyu Kim, Yongin-si, KR;
Minseok Kim, Yongin-si, KR;
Bongjun Kim, Yongin-si, KR;
Haram Yoo, Yongin-si, KR;
Kyunghoon Chung, Yongin-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H10K 71/16 (2023.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H10K 71/166 (2023.02);
Abstract
An apparatus for manufacturing a display apparatus includes a substrate. A mask assembly includes an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame. An electrostatic chuck is configured to attach the substrate to the at least one mask. A first driver is configured to drive the electrostatic chuck. At least a partial portion of the mask frame does not overlap the electrostatic chuck in a thickness direction of the substrate.