The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Jan. 20, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Paul Zachary Wirth, Kalispell, MT (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B25J 9/00 (2006.01); B25J 13/08 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); B25J 9/0009 (2013.01); B25J 13/087 (2013.01); H01L 21/67742 (2013.01); H01L 21/68 (2013.01); G05B 2219/49169 (2013.01);
Abstract
Disclosed are systems and methods for measuring the temperature change of one or more substrates within a semiconductor processing system. The temperature change information may be used to optimize throughput of substrates within the system and to troubleshoot quality issues that may be impacted by temperature.