The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2025

Filed:

Oct. 05, 2022
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Yi-Chi Lee, Taichung, TW;

Bo-Han Chen, Taichung, TW;

Chih-Hsuan Lu, Pingtung County, TW;

Ping-Han Wu, Tainan, TW;

Zih-Yi Li, Tainan, TW;

Shang-Yu Hsu, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); B23K 26/0622 (2014.01); H01S 3/00 (2006.01); H10D 62/832 (2025.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0624 (2015.10); H01S 3/005 (2013.01); H10D 62/8325 (2025.01);
Abstract

A laser machining device includes a pulsed laser generator, an accommodation chamber, a bandwidth broadening unit and a pulse compression unit. The pulsed laser generator is configured to emit a pulsed laser. The accommodation chamber has a gas inlet. The bandwidth broadening unit is disposed in the accommodation chamber, and is configured to broaden a frequency bandwidth of the pulsed laser to obtain a broad bandwidth pulsed laser. The pulse compression unit is disposed in the accommodation chamber. The bandwidth broadening unit and the pulse compression unit are arranged in order along a laser propagation path, and the pulse compression unit is configured to compress a pulse duration of the broad bandwidth pulsed laser.


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