The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2025

Filed:

May. 03, 2024
Applicants:

Yokogawa Electric Corporation, Musashino, JP;

Yokogawa Test & Measurement Corporation, Hachioji, JP;

Inventors:

Gentaro Ishihara, Hachioji, JP;

Hiroaki Matsukawa, Hachioji, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/18 (2006.01);
U.S. Cl.
CPC ...
G01J 3/28 (2013.01); G01J 3/18 (2013.01);
Abstract

A measurement apparatusaccording to this disclosure includes a controllerand a spectroscopehaving an optical element in which an apertureto pass light Lto be measured is formed. The controllerexecutes a first process to generate a synthetic spectrum Sr(i) of the narrowed light Lby synthesizing at least a first spectrum S() when a beam spot P of the light Lis at a first position xwithin the apertureand a second spectrum S() when the beam spot P of the light Lis at a second position xwithin the aperture. The first position xincludes a position shifted to one side in a predetermined direction D from a reference position xof the beam spot P within the aperture. The second position xincludes a position shifted to the other side from the reference position x


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