The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Aug. 17, 2023
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Shuhei Gotanda, Tokyo, JP;
Takahiro Nakanishi, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump includes: a cryopump container including a container body defining a cryopump intake port and extending axially and tubularly from the cryopump intake port, and a cryocooler accommodation cylinder connected to a side portion of the container body and extending transversely; a cryocooler fixed to the cryocooler accommodation cylinder and extending transversely within the cryopump container; a plurality of cryopanels thermally coupled to the second cooling stage of the cryocooler, capable of adsorbing a non-condensable gas, and axially arranged between the cryopump intake port and a bottom portion of the container body; and a purge gas inlet installed in the container body below the cryocooler accommodation cylinder to blow a purge gas to a distal portion of at least one of the cryopanels.