The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Mar. 07, 2023
Samsung Display Co., Ltd., Yongin-si, KR;
Dongwoo Fine-chem Co., Ltd., Iksan-si, KR;
Shinhyuk Yang, Yongin-si, KR;
Beomsoo Kim, Iksan-si, KR;
Hyeonsu Cho, Iksan-si, KR;
Jeehoon Kim, Yongin-si, KR;
Youngjin Yoon, Iksan-si, KR;
Eunwon Lee, Iksan-si, KR;
Donghan Kang, Yongin-si, KR;
Jihun Park, Yongin-si, KR;
Jongmoo Huh, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
DONGWOO FINE-CHEM Co., Ltd., Iksan-si, KR;
Abstract
An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; a first compound; and water, wherein the first compound is a compound containing: a sulfonic group, a sulfonic acid group, or a combination thereof; and an amine group, and an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by Equation 1. The description of Equation 1 is as in the specification.