The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Jul. 28, 2023
Applicants:

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Hon Young Semiconductor Corporation, Hsinchu, TW;

Inventors:

Yi-Kai Hsiao, New Taipei, TW;

Kuang-Hao Chiang, Hsinchu, TW;

Hao-Chung Kuo, New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/01 (2025.01); H01L 21/266 (2006.01); H10D 30/66 (2025.01); H10D 62/17 (2025.01); H10D 84/87 (2025.01); H01L 21/265 (2006.01); H10D 62/832 (2025.01);
U.S. Cl.
CPC ...
H10D 30/0291 (2025.01); H01L 21/266 (2013.01); H10D 30/051 (2025.01); H10D 30/66 (2025.01); H10D 62/299 (2025.01); H10D 84/87 (2025.01); H01L 21/2652 (2013.01); H10D 62/8325 (2025.01);
Abstract

A manufacturing method of a semiconductor device includes the following steps. A base region is formed in a substrate. A protective layer is formed on the substrate and covers the base region. First and second sacrificial layers are formed on the substrate and cover the protective layer. A source region, a well region, and a junction field effect transistor (JFET) region are formed in the substrate. When the source region, the well region, and the JFET region are formed in sequence, the source region and the well region are formed by the first sacrificial layer, and the JFET region is formed by the second sacrificial layer. When the JFET region, the well region, and the source region are formed in sequence, the JFET region is formed by the first sacrificial layer, and the well region and the source region are formed by the second sacrificial layer.


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