The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Dec. 08, 2021
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Osamu Yasunobe, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); G03F 7/70733 (2013.01);
Abstract

A substrate transportation hand for transporting a substrate includes: at least one first holding part provided on an upper surface side of the substrate transportation hand and capable of sucking and holding the substrate; at least one second holding part provided on a lower surface side of the substrate transportation hand and capable of sucking and holding the substrate; and a drive unit for independently turning on/off sucking using the first holding part and the second holding part, in order to provide a substrate transportation hand which can efficiently transport while preventing dust in accordance with a form of a substrate.


Find Patent Forward Citations

Yasunobe, Osamu. (2025). Substrate transportation hand, substrate transportation system, storage medium, and method for producing article (U.S. Patent No. 12489012). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12489012

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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