The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Dec. 20, 2022
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Pierre Brianceau, Grenoble, FR;
Nicolas Posseme, Grenoble, FR;
Abstract
A method for activating an exposed layer of a structure including a provision of a structure including an exposed layer, a deposition of a layer based on a material of formula SiYX, with X chosen from among fluorine F and chlorine Cl, and Y chosen from among oxygen O and nitrogen N, a, b and c being non-zero positive integers, a treatment of the layer SiYXby an activation plasma based on at least one from among oxygen and nitrogen, the parameters of the deposition of the layer SiYXbeing chosen so as to obtain a sufficiently low material density such that the layer SiYXis at least partially consumed by the activation plasma.