The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Aug. 25, 2023
Ketek Gmbh Halbleiter- Und Reinraumtechnik, Munich, DE;
Felix Düsberg, Munich, DE;
Florian Schneider, Munich, DE;
Michael Bachmann, Munich, DE;
Andreas Pahlke, Brunnthal, DE;
KETEK GmbH Halbleiter- und Reinraumtechnik, Munich, DE;
Abstract
In an embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, wherein the transmission window is configured to let through X-rays generated by the accelerated electrons, wherein the transmission window is located either in a straight extension of a line-of-flight of the accelerated electrons or off the line-of-flight and past the acceleration set-up, wherein the transmission window comprises a carbon carrier, and wherein the carbon carrier comprises sp2-hybridized carbon.