The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Aug. 26, 2022
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07D 307/36 (2006.01); C07D 333/10 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07D 307/36 (2013.01); C07D 333/10 (2013.01);
Abstract
A salt capable of producing a resist pattern with satisfactory CD uniformity (CDU) represented by formula (I), an acid generator and a resist composition including the same: wherein R, R, Rand Reach represent a halogen atom, a haloalkyl group, etc., Aand Aeach represent a hydrocarbon group, the group may have a substituent, —CH— in the group may be replaced by —O—, —CO—, —S—, —SO—, etc., Xand Xeach represent —O— or —S—, m1 present an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4 and m5 represent an integer of 0 to 3, m7 represent an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5, and AIrepresents an organic anion.