The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Jan. 12, 2021
Applicant:

Gudeng Precision Industrial Co., Ltd., New Taipei, TW;

Inventors:

Ming-Chien Chiu, New Taipei, TW;

Chia-Ho Chuang, New Taipei, TW;

Hsing-Min Wen, New Taipei, TW;

Yi-Hsuan Lee, New Taipei, TW;

Hsin-Min Hsueh, New Taipei, TW;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/66 (2012.01); B65D 81/24 (2006.01); B65D 85/30 (2006.01); G03F 1/22 (2012.01); G03F 7/00 (2006.01); G06K 7/14 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G03F 1/66 (2013.01); B65D 81/24 (2013.01); B65D 85/30 (2013.01); G03F 1/22 (2013.01); G03F 7/70741 (2013.01); G06K 7/14 (2013.01); H01L 21/67294 (2013.01); H01L 21/67353 (2013.01); H01L 21/67359 (2013.01); H01L 21/67366 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01);
Abstract

The invention discloses a reticle pod having a lid and multiple pin assemblies. The pin assembly includes a movable member movable relatively to a ceiling of the lid and an elastic member configured to arrange the movable member in between the elastic member and the ceiling of the lid. In the case where the reticle pod is provided without receiving a reticle, the ceiling of the reticle pod determines the movable member stays at a first level. In the case where the reticle pod is provided with a reticle, the elastic member collaborates with the movable member such that the movable member holds the reticle at a second level that is higher than the first level.


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