The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Feb. 05, 2021
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Budd Edward Faulkner, Hillsboro, OR (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 7/32 (2006.01); G01K 1/024 (2021.01); G06K 7/10 (2006.01); G06K 19/07 (2006.01); G06K 19/077 (2006.01);
U.S. Cl.
CPC ...
G01K 7/32 (2013.01); G01K 1/024 (2013.01); G06K 7/10297 (2013.01); G06K 19/0717 (2013.01); G06K 19/0723 (2013.01); G06K 19/07758 (2013.01); G06K 2007/10504 (2013.01);
Abstract
There is provided a method of detecting the temperature of a component of a support system for semiconductor processing equipment, the method comprising: applying a radio frequency identity tag to the component, the radio frequency identity tag having a serial number; reading the radio frequency identity tag with a reader, the reader arranged to read the serial number of the radio frequency identity tag, and to identify the resonant frequency of the radio frequency identity tag; and converting the resonant frequency of the radio frequency tag to a temperature of the radio frequency identity tag.