The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Jan. 20, 2022
Canon Tokki Corporation, Mitsuke, JP;
Shunsuke Okabe, Tokyo, JP;
Kentaro Suzuki, Tokyo, JP;
Taiichirou Aoki, Tokyo, JP;
Yoshihiro Nakasu, Tokyo, JP;
CANON TOKKI CORPORATION, Mitsuke, JP;
Abstract
The alignment mechanism of the present disclosure is configured to adjust positions of a substrate and a mask, the alignment mechanism being characterized by including a substrate suctioner configured to suction and hold the substrate; a mask supporter configured to support the mask; a temporary receiver configured to temporarily support at least one of the substrate to be suctioned by the substrate suctioner and the mask to be placed on the mask supporter, the temporary receiver being provided at the mask supporter; a horizontal coarse movement stage mechanism that carries the mask supporter and the temporary receiver and moves the mask supporter and the temporary receiver within the horizontal plane; and a vertical coarse movement stage mechanism that raises and lowers the horizontal coarse movement stage mechanism.