The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Nov. 05, 2021
Tohoku University, Sendai, JP;
Tohoku University, Sendai, JP;
Abstract
A positioning method includes a layering step of layering a first object and a second object, a detection step of detecting, after the layering step, a first signal obtained from a first array body of the first object, a second signal obtained from a second array body of the first object, a third signal obtained from the second array body of the second object, and a fourth signal obtained from the first array body of the second object, a calculating step of calculating positional deviation between the first object and the second object by respectively fitting the first to fourth signals, and an adjustment step of adjusting the positional deviation. The first array body has a first periodic structure having a period p, and the second array body has a second periodic structure having a period p. Neither the first array body nor the second array body of the first object overlaps the second array body or the first array body of the second object when the first object and the second object are layered.