The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Aug. 26, 2021
Applicant:
Yamaha Robotics Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
Yamaha Robotics Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B08B 7/00 (2006.01); B08B 7/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B08B 7/028 (2013.01); B06B 1/0269 (2013.01); B08B 7/00 (2013.01); B06B 2201/70 (2013.01); H01L 21/02076 (2013.01);
Abstract
An acoustic foreign matter removal device includes a stage, an acoustic head, and a movement mechanism. The acoustic head has a plurality of ultrasonic speakers and a casing. A plurality of ultrasonic waves generated from the plurality of ultrasonic speakers are concentrated in a gap between the casing and a holding surface of the stage to form a low pressure region; and foreign matter adhering to a surface of an electronic component is sucked into the low pressure region to remove the foreign matter from the surface.