The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Mar. 21, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
George M. Gammel, Marblehead, MA (US);
Eric Donald Wilson, Rockport, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01J 37/147 (2006.01); H01J 37/304 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01L 22/10 (2013.01); H01J 37/1474 (2013.01); H01J 37/304 (2013.01); H01J 2237/24542 (2013.01);
Abstract
A method includes receiving a spot beam profile is received for a spot ion beam; receiving a linear scanned beam profile for the spot ion beam; generating a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implementing an adjusted scanned profile for the spot ion beam, based upon the calculated calibration spot profile.