The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Dec. 26, 2023
Daihen Corporation, Osaka, JP;
Yuichi Hasegawa, Osaka, JP;
Yuya Ueno, Osaka, JP;
DAIHEN Corporation, Osaka, JP;
Abstract
A high-frequency power supply apparatus includes a first power supply, a second power supply, a matching circuit, and a low-pass filter. The first power supply outputs a high-frequency voltage with a first fundamental frequency toward a load. The second power supply outputs, toward the load, a negative polarity voltage with a second fundamental frequency lower than the first fundamental frequency. The matching circuit is connected between the first power supply and the load. The matching circuit matches impedance on a side of the first power supply and impedance on a side of the load. The low-pass filter is connected between the second power supply and the load. The first power supply performs frequency modulation control by: performing frequency-modulation on the high-frequency voltage with a trapezoidal modulation signal whose frequency is equal to the second fundamental frequency, and outputting a modulated wave obtained by the frequency-modulation on the high-frequency voltage.