The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2025

Filed:

Nov. 27, 2023
Applicant:

Ushio Denki Kabushiki Kaisha, Tokyo, JP;

Inventors:

Osamu Osawa, Tokyo, JP;

Koichi Ito, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01J 1/42 (2006.01); G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70066 (2013.01); G01J 1/42 (2013.01); G02B 5/20 (2013.01);
Abstract

An illumination optical system that irradiates a target object with light from a light source unit includes an integrator optical system, a condenser lens, and a bandpass filter. The integrator optical system is disposed on an optical path of the light emitted from the light source unit and uniformizes an illuminance distribution of the light with which the target object is to be irradiated. The condenser lens includes a plurality of lenses and irradiates the target object with the light emitted from the integrator optical system. The bandpass filter is disposed between any two of the plurality of lenses included in the condenser lens.


Find Patent Forward Citations

Loading…