Mechanism for remotely controlling the contacting of wafer probes attached to load pull tuners

Abstract

An on-wafer load pull tuner system includes an intelligent, universal, remotely controlled, mechanical wafer-probe contact controlling device, supporting automatic microwave single or multi-probe balanced slide screw tuners. It allows contacting and stable on-wafer testing of sub-micrometric devices. Ultra-low loss rigid airlines (bend-lines) used to connect the tuner with the semiconductor chips, in order to improve the tuning range at the DUT reference plane, transfer mechanical contact control movements of the wafer probes attached to the rigid bend-lines, when a counterweight tilts the tuner assembly by controlling the center of gravity of the assembly.