The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2025

Filed:

Jun. 28, 2023
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Satoru Tanaka, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/135 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/135 (2013.01); G01P 15/125 (2013.01);
Abstract

A physical quantity sensor includes a fixed portion, a support beam, a movable body, and a first fixed electrode group. The movable body is coupled to the other end of the support beam, and the first fixed electrode group is provided at a substrate and arranged in a first direction of the support beam. The movable body includes a first coupling portion, a first base portion, and a first movable electrode group. The first movable electrode group faces the first fixed electrode group in a second direction. Further, hm=hr, where hm is a height of a gravity center position of the movable body in a third direction and hr is a height of a rotation center of the support beam in the third direction.


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