The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Nov. 28, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Dylan Arius Harootunian, Burlingame, CA (US);
Damon K. Cox, Jarrell, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A calibration disc is inserted into a processing chamber using a robot arm. A first position of a center of the calibration disc is determined using one or more sensors positioned at a port of the processing chamber. The calibration disc is placed onto a substrate support within the processing chamber and features of the calibration disc cause the calibration disc to become centered on the substrate support. The calibration disc is removed from the substrate support and the processing chamber by the robot arm. A second position of the center of the calibration disc is determined using one or more sensors as the calibration is removed from the processing chamber. A difference is determined between the first and second position of the center of the calibration disc. An offset is determined to apply to the robot arm when placing wafers onto the substrate support based on the difference.