The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2025

Filed:

Sep. 17, 2021
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Ji-Hee Son, Hwaseong-si, KR;

Youngmin Moon, Yongin-si, KR;

Jaeuoon Kim, Hwaseong-si, KR;

Seungyong Song, Suwon-si, KR;

Sungsoon Im, Suwon-si, KR;

Jong-Hyun Choung, Suwon-si, KR;

Hyunmin Cho, Hwaseong-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 16/04 (2006.01); H10K 71/16 (2023.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 16/042 (2013.01); H10K 71/166 (2023.02);
Abstract

A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.


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