The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
May. 20, 2022
Applicant:
Jsw Aktina System Co., Ltd., Yokohama, JP;
Inventors:
Assignee:
JSW Aktina System Co., Ltd., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/70 (2014.01); B23K 31/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/705 (2015.10); B23K 26/707 (2015.10); B23K 31/006 (2013.01);
Abstract
A laser irradiation apparatus is a laser irradiation apparatus including a laser light source, the laser irradiation apparatus including a failure prediction unit configured to perform failure prediction on a movable part used when a substrate is processed by the laser light source, in which the failure prediction unit acquires a physical quantity when the movable part is movable, and derives a failure time of the movable part based on an acquired physical quantity.