The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2025

Filed:

Oct. 13, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Kyeongmin Baek, Hwaseong-si, KR;

Sungmin Jang, Suwon-si, KR;

Seongkeun Kang, Hwaseong-si, KR;

Taehyun Kim, Asan-si, KR;

Seongyun Ryu, Asan-si, KR;

Byungku Yoo, Hwaseong-si, KR;

Seungjun Lee, Hwaseong-si, KR;

Woosung Choi, Goyang-si, KR;

Haeyong Choi, Yongin-si, KR;

Joungwoo Han, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/86 (2006.01); B01D 53/06 (2006.01); B01D 53/72 (2006.01); B01D 53/75 (2006.01); B01D 53/88 (2006.01); B01J 35/56 (2024.01); B01D 53/04 (2006.01); B01D 53/83 (2006.01); B01J 23/89 (2006.01);
U.S. Cl.
CPC ...
B01D 53/8631 (2013.01); B01D 53/72 (2013.01); B01D 53/75 (2013.01); B01D 53/8634 (2013.01); B01D 53/8668 (2013.01); B01D 53/88 (2013.01); B01J 35/56 (2024.01); B01D 53/0407 (2013.01); B01D 53/0462 (2013.01); B01D 53/06 (2013.01); B01D 53/83 (2013.01); B01D 53/8621 (2013.01); B01D 53/8628 (2013.01); B01D 2253/102 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2253/3425 (2013.01); B01D 2255/9022 (2013.01); B01D 2257/40 (2013.01); B01D 2257/406 (2013.01); B01D 2257/708 (2013.01); B01D 2258/0216 (2013.01); B01J 23/89 (2013.01);
Abstract

An integrated waste gas treatment system includes an adsorption/desorption device that receives a waste gas that includes an organic compound and an organic nitrogen compound exhausted from a semiconductor manufacturing facility, where the adsorption/desorption device adsorbs the organic compound and the organic nitrogen compound and concentrates and desorbs the organic compound and the organic nitrogen compound, and a catalytic decomposition device disposed adjacent to the adsorption/desorption device, where the catalytic decomposition device includes a catalytic chamber that provides a gas passage through which a gas desorbed from the adsorption/desorption device flows and an oxidation-reduction catalyst disposed in the gas passage that removes the organic compound and the organic nitrogen compound from the desorbed gas. The organic compound and the organic nitrogen compound are subjected to an oxidation treatment by the oxidation-reduction catalyst, and nitrogen oxides generated by the oxidation treatment are removed by a selective reduction reaction.


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