The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2025

Filed:

Jun. 24, 2020
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Yoichiro Tarui, Tokyo, JP;

Nobuo Fujiwara, Tokyo, JP;

Takanori Tanaka, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 62/10 (2025.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H10D 62/832 (2025.01); H10D 84/00 (2025.01);
U.S. Cl.
CPC ...
H10D 62/111 (2025.01); H01L 21/02529 (2013.01); H01L 21/0475 (2013.01); H10D 62/8325 (2025.01); H10D 84/146 (2025.01);
Abstract

The present disclosure relates a semiconductor device using a super junction structure, and includes: a semiconductor base body of a first conductivity type; a pillar part including a plurality of first pillars of a first conductivity type and a plurality of second pillars of a second conductivity type provided on the semiconductor base body to protrude in a thickness direction of the semiconductor base body; a pillar surrounding part of a first conductivity type or a second conductivity type provided around the pillar part; and a semiconductor element in which the pillar part is provided as an active region, wherein the plurality of first and second pillars have a striped shape in a plan view, and are alternately arranged in parallel to each other in a pillar width direction perpendicular to a longitudinal direction of each of the pillars.


Find Patent Forward Citations

Loading…